Art
J-GLOBAL ID:200902182536082525   Reference number:93A0417202

A Thin Form Ultrasonic Linear Motor Using a Flexural Double Mode Piezo-Ceramic Square Vibrator.

屈曲2重モード圧電セラミックス正方形板を用いた薄型リニア・モータ
Author (4):
Material:
Volume: 1993  Issue: Spring Pt 2  Page: 857-858  Publication year: Mar. 1993 
JST Material Number: G0381B  ISSN: 1340-3168  Document type: Proceedings
Country of issue: Japan (JPN)  Language: JAPANESE (JA)

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