Surface Profile Measurement by Phase and Contrast Detection using Grating Projection Method.

TONOOKA MASAHITO; YAMAMOTO MASAYUKI; OTANI YUKITOSHI; YOSHIZAWA TOORU; ISHIHARA MITSUHIRO; NAKAZATO YASUO; SASAKI HIROMI

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J-GLOBAL ID：200902182594625741 Reference number：00A0151785

Surface Profile Measurement by Phase and Contrast Detection using Grating Projection Method.

格子パターン投影法を用いた位相およびコントラスト検出による表面形状計測

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Material：
Volume： 66 Issue： 1 Page： 132-136 Publication year： Jan. 05, 2000
JST Material Number： F0268A ISSN： 0912-0289 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Measuring methods and instruments of length,area,cross section,volume,angle

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