Art
J-GLOBAL ID：200902183389985049   Reference number：98A0602625

Subplantation effect in magnetron sputtered superhard boron carbide thin films.

マグネトロンスパッタした超硬質炭化ほう素薄膜におけるサブプランテーション効果
Author (5)：
ULRICH S

About ULRICH S

(Forschungszentrum Karlsruhe GmbH, Karlsruhe, DEU)

About Forschungszentrum Karlsruhe GmbH, Karlsruhe, DEU

, 
EHRHARDT H

About EHRHARDT H

(Univ. Kaiserslautern, Kaiserslautern, DEU)

About Univ. Kaiserslautern, Kaiserslautern, DEU

, 
SCHWAN J

About SCHWAN J

(Univ. Kaiserslautern, Kaiserslautern, DEU)

About Univ. Kaiserslautern, Kaiserslautern, DEU

, 
SAMLENSKI R

About SAMLENSKI R

(Univ. Freiburg, Freiburg, DEU)

About Univ. Freiburg, Freiburg, DEU

, 
BRENN R

About BRENN R

(Univ. Freiburg, Freiburg, DEU)

About Univ. Freiburg, Freiburg, DEU


Material：
Diamond and Related Materials  (Diam Relat Mater)

About Diamond and Related Materials


Volume： 7  Issue： 6  Page： 835-838  Publication year： Jun. 1998 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*boron carbide

About boron carbide

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Semiconductor thin films 
(BK14040E)

About Semiconductor thin films

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
マグネトロンスパッタ

About マグネトロンスパッタ

, 
硬質

About 硬質

, 
炭化ほう素

About 炭化ほう素

, 
薄膜

About 薄膜

, 
サブ

About サブ

, 
プランテーション

About プランテーション


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