High-temperature oxidation of TiN/CrN multilayers reactively sputtered at low temperatures.

PANJAN P; NAVINSEK B; CVELBAR A; ZALAR A; VLCEK J

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J-GLOBAL ID：200902184031304488 Reference number：98A0385168

High-temperature oxidation of TiN/CrN multilayers reactively sputtered at low temperatures.

低温での反応性スパッタによるTiN/CrN多層膜の高温酸化

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Material：
Volume： 98 Issue： 1/3 Page： 1497-1502 Publication year： Jan. 1998
JST Material Number： D0205C ISSN： 0257-8972 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Ceramic coating to metallic materials , Ceramic coating to nonmetallic materials , Thin films of other inorganic compounds

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