Art
J-GLOBAL ID:200902184324216001   Reference number:98A0669463

Nitrogen ion implantation into three-dimensional substrates by plasma source ion implantation.

プラズマ源イオン注入による三次元基板中への窒素イオンの注入
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Material:
Volume: 54  Issue: 1/3  Page: 135-138  Publication year: Jul. 1998 
JST Material Number: E0934A  ISSN: 0254-0584  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Irradiational changes of metals  ,  Surface hardening 
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