Art
J-GLOBAL ID：200902184324216001   Reference number：98A0669463

Nitrogen ion implantation into three-dimensional substrates by plasma source ion implantation.

プラズマ源イオン注入による三次元基板中への窒素イオンの注入
Author (2)：
BABA K

About BABA K

(Technol. Center of Nagasaki, Nagasaki, JPN)

About Technol. Center of Nagasaki, Nagasaki, JPN

, 
HATADA R

About HATADA R

(Technol. Center of Nagasaki, Nagasaki, JPN)

About Technol. Center of Nagasaki, Nagasaki, JPN


Material：
Materials Chemistry and Physics  (Mater Chem Phys)

About Materials Chemistry and Physics


Volume： 54  Issue： 1/3  Page： 135-138  Publication year： Jul. 1998 
JST Material Number： E0934A  ISSN： 0254-0584  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*plasma source

About plasma source

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
プラズマ源イオン注入

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Irradiational changes of metals 
(BK16122N)

About Irradiational changes of metals

,  Surface hardening 
(WC03030E)

About Surface hardening

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Terms in the title
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プラズマ源イオン注入

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, 
窒素イオン

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, 
注入

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