Art
J-GLOBAL ID：200902184802054845   Reference number：00A0888941

DLC Coating Film Properties in Unbalanced Magnetron Sputtering.

アンバランスドマグネトロンスパッタリング法により形成したDLC皮膜の特性
Author (2)：
AKARI KOICHIRO

About AKARI KOICHIRO

(神戸製鋼所)

About 神戸製鋼所

, 
IWAMURA EIJI

About IWAMURA EIJI

(神戸製鋼所 材研)

About 神戸製鋼所 材研


Material：
R&D神戸製鋼技報  (R&D/神戸製鋼技報)

About R&D神戸製鋼技報


Volume： 50  Issue： 2  Page： 58-61  Publication year： Sep. 01, 2000 
JST Material Number： F0164A  ISSN： 0373-8868  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*magnetron sputtering

About magnetron sputtering

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
DLC(carbon)

About DLC(carbon)


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Vapor plating 
(WC08022K)

About Vapor plating

,  Carbon and its compounds 
(YB02060D)

About Carbon and its compounds

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
DLC

About DLC

, 
皮膜

About 皮膜


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