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J-GLOBAL ID：200902186791929138   Reference number：01A1009095

Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr,Ti)O₃ Thin Films Prepared by Aerosol Deposition Method.

エーロゾル堆積法により作製したPb(Zr,Ti)O₃薄膜の電気および光学特性に及ぼすキャリアガス状件の影響

Author (2)： AKEDO J (National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN) ,  LEBEDEV M (National Inst. Advanced Industrial Sci. and Technol. (AIST), Ibaraki, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 40  Issue： 9B  Page： 5528-5532  Publication year： Sep. 30, 2001 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *ferroelectrics ,...
Semi thesaurus term： *PZT ,...

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JST classification (3)： Ferroelectrics,antiferroelectrics and ferroelasticity  (BM05030B) ,  Oxide thin films  (BK14050P) ,  Optical properties of condensed matter in general  (BM08010A)

Reference (27)：

• 1) C. Hayashi, S. Kashu, M. Oda and F. Naruse: Mater. Sci. Eng. A 163 (1993) 157.
• 2) J. Akedo: Oyo Buturi 68 (1999) 44 [in Japanese].
• 3) M. Sayer, D. A. Barrow, R. Noteboom, E. M. Grisword and Z. Wu: Proc. NATO Advanced Research Workshop on Science and Technology of Electroceramic Thin Films (Kluwer Academic Publishers, Dordrecht, Netherlands, 1995) p. 399.
• 4) J. Akedo, M. Ichiki, K. Kikuchi and R. Maeda: Sens. & Actuat. A -Phys. <B>69</B> (1998) 106.
• 5) J. Akedo, N. Minami, K. Fukuda, M. Ichiki and R. Maeda: Ferroelectrics 231 (1999) 285.

Terms in the title (9)： エーロゾル堆積法 ,  作製 ,  Pb ,  Zr ,  Ti ,  O3 ,  薄膜 ,  光学特性 ,  キャリアガス