Art
J-GLOBAL ID:200902186985143550   Reference number:02A0568931

Narrow size-distributed silicon cluster beam generated using a spatiotemporal confined cluster source.

時空間閉じ込め型クラスター源を用いて発生した狭いサイズ分布のシリコンクラスタービーム
Author (9):
Material:
Volume: 358  Issue: 1/2  Page: 36-42  Publication year: May. 24, 2002 
JST Material Number: B0824A  ISSN: 0009-2614  Document type: Article
Article type: 短報  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Category name(code) classified by JST.
Atomic beams,molecular beams  ,  Atomic and molecular clusters 

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