Art
J-GLOBAL ID：200902187023575048   Reference number：00A0858415

Thin Plate Longitudinal Vibrator Touch Probe Sensor using PZT Thin Film.

PZT薄膜を用いる薄板縦振動子接触プローブセンサ
Author (4)：
KUROSAWA M K

About KUROSAWA M K

(Tokyo Inst. Technol., Yokohama, JPN)

About Tokyo Inst. Technol., Yokohama, JPN

, 
KANDA T

About KANDA T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
HIGUCHI T

About HIGUCHI T

(Univ. Tokyo, Tokyo, JPN)

About Univ. Tokyo, Tokyo, JPN

, 
MORITA T

About MORITA T

(Inst. Physical and Chemical Res., Wako, JPN)

About Inst. Physical and Chemical Res., Wako, JPN


Material：
Proceedings. IEEE Ultrasonics Symposium  (Proceedings. Ultrasonics Symposium)

About Proceedings. IEEE Ultrasonics Symposium


Volume： 1999  Issue： Vol.1  Page： 703-706  Publication year： 1999 
JST Material Number： A0437C  ISSN： 1051-0117  Document type： Proceedings
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*piezoelectric vibrator

About piezoelectric vibrator

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*PZT

About PZT

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Piezoelectric devices 
(NC03110I)

About Piezoelectric devices

,  Nondestructive testing 
(HB02030F)

About Nondestructive testing

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
PZT

About PZT

, 
薄膜

About 薄膜

, 
薄板

About 薄板

, 
縦

About 縦

, 
振動子

About 振動子


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