Art
J-GLOBAL ID：200902189724627789   Reference number：01A0267901

Development of plasma chemical vaporization machining.

プラズマ化学蒸発加工法の開発
Author (4)：
MORI Y

About MORI Y

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
YAMAUCHI K

About YAMAUCHI K

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
YAMAMURA K

About YAMAMURA K

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
SANO Y

About SANO Y

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN


Material：
Review of Scientific Instruments  (Rev Sci Instrum)

About Review of Scientific Instruments


Volume： 71  Issue： 12  Page： 4627-4632  Publication year： Dec. 2000 
JST Material Number： D0517A  ISSN： 0034-6748  CODEN： RSINAK  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*evaporation

About evaporation

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
silica

About silica


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Applications of plasma 
(BJ02110K)

About Applications of plasma

,  Techniques for samples 
(BA02070O)

About Techniques for samples

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
プラズマ化学

About プラズマ化学

, 
蒸発

About 蒸発

, 
開発

About 開発


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