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J-GLOBAL ID:200902189735822192   Reference number:97A0560279

An ab initio molecular orbital study of ion-solid interaction in carbon deposition processes.

炭素蒸着過程におけるイオン-固体相互作用のab initio分子軌道研究
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Material:
Volume: 113/114  Page: 652-655  Publication year: Apr. 1997 
JST Material Number: B0707B  ISSN: 0169-4332  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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