Influence of growth conditions on electrical characteristics of AlN on SiC.

ZETTERLING C-M; OESTLING M; NORDELL N; SCHOEN O; DESCHLER M

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J-GLOBAL ID：200902190486854265 Reference number：97A0698259

Influence of growth conditions on electrical characteristics of AlN on SiC.

SiC上のAlNの電気的特性に及ぼす成長条件の影響

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Author (5)： , , , ,
Material：
Volume： 70 Issue： 26 Page： 3549-3551 Publication year： Jun. 30, 1997
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films , Electric conduction in crystalline semiconductors

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