Art

J-GLOBAL ID：200902190486968724   Reference number：97A0823513

Materials Characterization of Plasma Deposited Copolymer Using CFC-113 With C₂H₄ Monomer.

C₂H₄モノマとCFC-113を使ってプラズマ蒸着した共重合体の材料特性

Author (4)： TSUJI O (SAMCO Inaternational Inc., Kyoto, JPN) ,  MINAGUCHI T (SAMCO Inaternational Inc., Kyoto, JPN) ,  NAKANO H (SAMCO Inaternational Inc., Kyoto, JPN) ,  TATSUTA T (SAMCO Inaternational Inc., Kyoto, JPN)
Material： Japanese Journal of Applied Physics. Part 1. Regular Papers, Short Notes & Review Papers  (Japanese Journal of Applied Physics. Part 1. Regular Papers, Brief Communications & Review Papers)
Volume： 36  Issue： 7B  Page： 4964-4967  Publication year： Jul. 1997 
JST Material Number： G0520B  ISSN： 0021-4922  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： aliphatic chlorine compound ,...
Semi thesaurus term： ethylene

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JST classification (2)： Copolymerization  (CG04030D) ,  Thin films of organic compounds  (BK14070L)

Reference (10)：

• 1) O. Tsuji: U.S. Pat. 5, 569,810.
• 2) O. Tsuji, M. Sawai, H. Nakano and K. Miyashita: 7th Symp. Plasma Materials Conf. Abstr. (1994) p. 48.
• 3) O. Tsuji, M. Sawai, H. Nakano and T. Minaguchi: Chem. Instrum. (1995) Feb., 73.
• 4) O. Tsuji, M. Sawai, H. Nakano, T. Minaguchi and T. Wydeven: 12th Int. Symp. Plasma Chemistry, Minneapolis, Minn., Abstr. (1995) p. 983.
• 5) O. Tsuji, T. Minaguchi, H. Nakano and T. Tatsuta: 3rd Asia-Pacific Conf. On Plasma Sci. & Tech., Proc. (1996) p. 111.

Terms in the title (5)： モノマ ,  CFC-113 ,  プラズマ蒸着 ,  共重合体 ,  材料特性