Art
J-GLOBAL ID：200902191521840260   Reference number：95A0774630

Approaches to problems in CVD using Computer Aided Reaction Design.

Computer Aided Reaction Designを用いたCVDにおける問題解決へのアプローチ
Author (4)：
TAKAHASHI TAKAHIRO

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(東大 工)

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, 
HAGIWARA KATSUNORI

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(東大 工)

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, 
EGASHIRA YASUYUKI

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(東大 工)

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, 
KOMIYAMA HIROSHI

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(東大 工)

About 東大 工


Material：
化学工学  (Chemical Engineering of Japan)

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Volume： 59  Issue： 9  Page： 642-643  Publication year： Sep. 1995 
JST Material Number： F0099A  ISSN： 0375-9253  CODEN： KKGKA4  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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Computer Simulation

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,...
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CARD

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JST classification (1)：
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Chemical reaction engineering,chemical kinetics 
(XE01020M)

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Reference (3)：
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DESIGN

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, 
CVD

About CVD

, 
問題解決

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