Art
J-GLOBAL ID：200902191623293795   Reference number：98A0992237

Applications of electrochemical microfabrication: An introduction.

電気化学的微細加工の応用 序言
Author (1)：
DATTA M

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(IBM Res. Div., New York)

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Material：
IBM Journal of Research and Development  (IBM J Res Dev)

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Volume： 42  Issue： 5  Page： 563-566  Publication year： Sep. 1998 
JST Material Number： D0061B  ISSN： 0018-8646  CODEN： IBMJAE  Document type： Article
Article type： 解説  Country of issue： United States (USA)  Language： ENGLISH (EN)
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Electroplating

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,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
multi chip moldule

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

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,  Electroplating 
(WC08023B)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
電気化学

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, 
微細加工

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, 
応用

About 応用


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