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J-GLOBAL ID：200902192195855038   Reference number：97A0635168

Block Copolymer Lithography: Periodic Arrays of ~1011 Holes in 1 Square Centimeter.

ブロック共重合体リソグラフィー 1平方センチメートル中の~1011の穴の周期的配列
Author (5)：
PARK M

About PARK M

(Princeton Univ., NJ, USA)

About Princeton Univ., NJ, USA

, 
HARRISON C

About HARRISON C

(Princeton Univ., NJ, USA)

About Princeton Univ., NJ, USA

, 
CHAIKIN P M

About CHAIKIN P M

(Princeton Univ., NJ, USA)

About Princeton Univ., NJ, USA

, 
REGISTER R A

About REGISTER R A

(Princeton Univ., NJ, USA)

About Princeton Univ., NJ, USA

, 
ADAMSON D H

About ADAMSON D H

(Princeton Univ., NJ, USA)

About Princeton Univ., NJ, USA


Material：
Science

About Science


Volume： 276  Issue： 5317  Page： 1401-1404  Publication year： May. 30, 1997 
JST Material Number： E0078A  ISSN： 0036-8075  CODEN： SCIEA  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
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diblock copolymer

About diblock copolymer

,...
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JST classification (3)：
JST classification
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Techniques for samples 
(BA02070O)

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,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Structure and morphology of polymer solids 
(CG02022M)

About Structure and morphology of polymer solids

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ブロック共重合体リソグラフィー

About ブロック共重合体リソグラフィー


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