Art
J-GLOBAL ID：200902192379901130   Reference number：98A0789495

Surface Micromachining for Microelectromechanical Systems.

微小電気機械システムのための表面マイクロマシニング
Author (3)：
BUSTILLO J M

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(Univ. California at Berkeley, CA, USA)

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, 
HOWE R T

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(Univ. California at Berkeley, CA, USA)

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, 
MULLER R S

About MULLER R S

(Univ. California at Berkeley, CA, USA)

About Univ. California at Berkeley, CA, USA


Material：
Proceedings of the IEEE  (Proc IEEE)

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Volume： 86  Issue： 8  Page： 1552-1574  Publication year： Aug. 1998 
JST Material Number： D0378A  ISSN： 0018-9219  CODEN： IEEPAD  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
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*micromachining

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,...
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JST classification (1)：
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (2)：
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微小電気機械システム

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, 
表面マイクロマシニング

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