Effect of substrate temperature on properties of thin films prepared by RF sputtering from CuInSe<sub>2</sub> target with Na<sub>2</sub>Se.

TANAKA T; YAMAGUCHI T; WAKAHARA A; YOSHIDA A

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J-GLOBAL ID：200902193029887556 Reference number：99A0694458

Effect of substrate temperature on properties of thin films prepared by RF sputtering from CuInSe₂ target with Na₂Se.

Na₂Seを加えたCuInSe₂ターゲットのRFスパッタリングにより作製した膜の性質に対する基板温度の効果

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Volume： 343/344 Page： 320-323 Publication year： Apr. 1999
JST Material Number： B0899A ISSN： 0040-6090 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Semiconductor thin films

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Effect of substrate temperature on properties of thin films prepared by RF sputtering from CuInSe2 target with Na2Se.

Effect of substrate temperature on properties of thin films prepared by RF sputtering from CuInSe₂ target with Na₂Se.