Low temperature epitaxial deposition of ZnS onto (100)Si by RF magnetron sputtering and molecular beam epitaxy.

MCCLEAN I P; SPINK D M; THOMAS C B; TSAKONAS K

Art

J-GLOBAL ID：200902193398112754 Reference number：95A0028011

Low temperature epitaxial deposition of ZnS onto (100)Si by RF magnetron sputtering and molecular beam epitaxy.

RFマグネトロンスパッタリングと分子ビームエピタクシーによる(100)Si上へのZnSの低温エピタキシャル成長

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Material：
Volume： 143 Issue： 3/4 Page： 172-175 Publication year： Oct. 1994
JST Material Number： B0942A ISSN： 0022-0248 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Semiconductor thin films

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