RF magnetron sputtering

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Synonyms (5)：

radio frequency magnetron sputtering (高周波マグネトロンスパッタリング)
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radio frequency magnetron sputtering (ラジオ波マグネトロンスパッタリング)
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RF magnetron sputtering method (RFマグネトロンスパッタ法)
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radio frequency magnetron sputtering method (高周波マグネトロンスパッタ法)
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radio frequency magnetron sputtering method (ラジオ波マグネトロンスパッタ法)
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Broader terms (2)：

sputtered deposition (スパッタ蒸着)
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magnetron sputtering (マグネトロンスパッタリング)
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