Art
J-GLOBAL ID：200902193599650630   Reference number：02A0599370

High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems.

Cu/Siコンタクト系における薄いナノ結晶ZrN拡散障壁の高性能
Author (4)：
TAKEYAMA M B

About TAKEYAMA M B

(Kitami Inst. Technol., Kitami, JPN)

About Kitami Inst. Technol., Kitami, JPN

, 
ITOI T

About ITOI T

(Kitami Inst. Technol., Kitami, JPN)

About Kitami Inst. Technol., Kitami, JPN

, 
AOYAGI E

About AOYAGI E

(Tohoku Univ., Sendai, JPN)

About Tohoku Univ., Sendai, JPN

, 
NOYA A

About NOYA A

(Kitami Inst. Technol., Kitami, JPN)

About Kitami Inst. Technol., Kitami, JPN


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 190  Issue： 1/4  Page： 450-454  Publication year： May. 08, 2002 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*Copper

About Copper

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Metallic thin films 
(BK14030T)

About Metallic thin films

,  Diffusion in solids in general 
(BL06021L)

About Diffusion in solids in general

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
Cu

About Cu

, 
Si

About Si

, 
コンタクト

About コンタクト

, 
ナノ結晶

About ナノ結晶

, 
拡散障壁

About 拡散障壁

, 
高性能

About 高性能


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