High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems.

TAKEYAMA M B; ITOI T; AOYAGI E; NOYA A

Art

J-GLOBAL ID：200902193599650630 Reference number：02A0599370

High performance of thin nano-crystalline ZrN diffusion barriers in Cu/Si contact systems.

Cu/Siコンタクト系における薄いナノ結晶ZrN拡散障壁の高性能

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Author (4)： , , ,
Material：
Volume： 190 Issue： 1/4 Page： 450-454 Publication year： May. 08, 2002
JST Material Number： B0707B ISSN： 0169-4332 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Metallic thin films , Diffusion in solids in general , Thin films of other inorganic compounds

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