Atomic Layer Growth and Characterization of ZnO Thin Films.

SAITO K; YAMAMOTO Y; MATSUDA A; IZUMI S; UCHINO T; ISHIDA K; TAKAHASHI K

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J-GLOBAL ID：200902193649551450 Reference number：02A0239537

Atomic Layer Growth and Characterization of ZnO Thin Films.

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Author (7)： , , , , , ,
Material：
Volume： 229 Issue： 2 Page： 925-929 Publication year： Jan. 08, 2002
JST Material Number： C0599A ISSN： 0370-1972 Document type： Article
Country of issue： Germany, Federal Republic of (DEU) Language： ENGLISH (EN)

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