Recent Development of Advanced Functional Polymers for Semiconductor Encapsulants of Integrated Circuit Chips and High-temperature Photoresist for Electronic Applications.

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J-GLOBAL ID：200902194106893617 Reference number：97A0552590

Recent Development of Advanced Functional Polymers for Semiconductor Encapsulants of Integrated Circuit Chips and High-temperature Photoresist for Electronic Applications.

集積回路チップの半導体カプセル化剤用並びに電子用途の耐熱性フォトレジスト用の先進機能性高分子の最近の進歩

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Volume： 8 Issue： 4 Page： 215-226 Publication year： Apr. 1997
JST Material Number： W0503A ISSN： 1042-7147 CODEN： PADTE5 Document type： Article
Article type：解説 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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