Structure control of Pb(Zr,Ti)O<sub>3</sub> films using PbTiO<sub>3</sub> buffer layers produced by magnetron sputtering.

CATTAN E; VELU G; JABER B; REMIENS D; THIERRY B

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J-GLOBAL ID：200902196848314440 Reference number：97A0385118

Structure control of Pb(Zr,Ti)O₃ films using PbTiO₃ buffer layers produced by magnetron sputtering.

マグネトロンスパッタリングにより作製したPb(Zr,Ti)O₃膜のPbTiO₃バッファ層による構造制御

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Author (5)： , , , ,
Material：
Volume： 70 Issue： 13 Page： 1718-1720 Publication year： Mar. 31, 1997
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Thin films of other inorganic compounds

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Structure control of Pb(Zr,Ti)O3 films using PbTiO3 buffer layers produced by magnetron sputtering.

Structure control of Pb(Zr,Ti)O₃ films using PbTiO₃ buffer layers produced by magnetron sputtering.