Art
J-GLOBAL ID：200902197218316700   Reference number：01A0552243

The ohmic character of doped AlN films.

ドープしたAlN膜のオーミック特性
Author (5)：
OKAMOTO M

About OKAMOTO M

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
YAP Y K

About YAP Y K

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
YOSHIMURA M

About YOSHIMURA M

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
MORI Y

About MORI Y

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN

, 
SASAKI T

About SASAKI T

(Osaka Univ., Osaka, JPN)

About Osaka Univ., Osaka, JPN


Material：
Diamond and Related Materials  (Diam Relat Mater)

About Diamond and Related Materials


Volume： 10  Issue： 3/7  Page： 1322-1325  Publication year： Mar. 2001 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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*aluminum nitride

About aluminum nitride

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Electric conduction in crystalline semiconductors 
(BM03043X)

About Electric conduction in crystalline semiconductors

Terms in the title (2)：
Terms in the title
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ドープ

About ドープ

, 
AlN

About AlN


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