Art
J-GLOBAL ID：200902197341623014   Reference number：95A0654828

Atomic force microscope lithography using amorphous silicon as a resist and advances in parallel operation.

レジストとして非晶質シリコンを用いた原子間力顕微鏡リソグラフィーおよび平行操作における進歩
Author (4)：
MINNE S C

About MINNE S C

(Stanford Univ., California)

About Stanford Univ., California

, 
FLUECKIGER P

About FLUECKIGER P

(Stanford Univ., California)

About Stanford Univ., California

, 
SOH H T

About SOH H T

(Stanford Univ., California)

About Stanford Univ., California

, 
QUATE C F

About QUATE C F

(Stanford Univ., California)

About Stanford Univ., California


Material：
Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures  (Journal of Vacuum Science & Technology. B. Microelectronics Processing and Phenomena)

About Journal of Vacuum Science & Technology. B. Microelectronics and Nanometer Structures


Volume： 13  Issue： 3  Page： 1380-1385  Publication year： May. 1995 
JST Material Number： E0974A  ISSN： 1071-1023  CODEN： JVTBD9  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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All keywords is available on JDreamIII(charged).
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atomic force microscope

About atomic force microscope

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
anodic oxidation

About anodic oxidation


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JST classification (2)：
JST classification
Category name(code) classified by JST.
Electron and ion microscopes 
(BD02050B)

About Electron and ion microscopes

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
レジスト

About レジスト

, 
非晶質シリコン

About 非晶質シリコン

, 
原子間力顕微鏡

About 原子間力顕微鏡

, 
リソグラフィー

About リソグラフィー


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