Art
J-GLOBAL ID:200902197559342394   Reference number:96A0361799

Production and control of K-C60 plasma for material processing.

物質プロセシングのためのK-C60プラズマの生成と制御
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Volume: 14  Issue:Page: 615-618  Publication year: Mar. 1996 
JST Material Number: C0789B  ISSN: 0734-2101  CODEN: JVTAD6  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds  ,  Applications of plasma 
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