Art
J-GLOBAL ID：200902197821575400   Reference number：02A0435843

Effects of the Anode Surfaces on Capacitive Coupled RF Plasmas.

容量結合型高周波放電における陽極表面状態の影響
Author (2)：
KUBO TAKASHI

About KUBO TAKASHI

(広島国際学院大 工)

About 広島国際学院大 工

, 
TANAKA MAKOTO

About TANAKA MAKOTO

(広島国際学院大 工)

About 広島国際学院大 工


Material：
真空  (Journal of the Vacuum Society of Japan)

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Volume： 45  Issue： 3  Page： 173-176  Publication year： Mar. 20, 2002 
JST Material Number： G0194A  ISSN： 0559-8516  CODEN： SHINA  Document type： Article
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*high frequency discharge

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,...
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Thesaurus term/Semi thesaurus term
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*positive electrode

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JST classification (2)：
JST classification
Category name(code) classified by JST.
Gas discharges 
(BJ03020T)

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,  Plasma diagnostics 
(BJ02090L)

About Plasma diagnostics

Reference (7)：
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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
容量結合

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, 
高周波放電

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, 
陽極

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