Art
J-GLOBAL ID：200902198101730456
Reference number：01A0510524
Friction and wear performance of unbalanced magnetron sputter-deposited diamond-like carbon multilayer coatings.
非平衡マグネトロンスパッタリングで堆積したダイアモンド状炭素多層コーティングの摩擦と摩耗特性
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Author (1)：
Material：
Page：
263-266
Publication year：
2000
JST Material Number：
K20010043
ISBN：
0-87339-495-X
Document type：
Proceedings
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
Thesaurus term：
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Carbon and its compounds
, Thin films of other inorganic compounds
Terms in the title (7)：
Terms in the title
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