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J-GLOBAL ID:200902199120952989   Reference number:00A0833101

On a Tunable Bistable MEMS-Theory and Experiment.

調整できる双安定のMEMS 理論と実験
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Volume:Issue:Page: 157-170  Publication year: Jun. 2000 
JST Material Number: W0357A  ISSN: 1057-7157  CODEN: JMIYET  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Beams girders 
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