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J-GLOBAL ID:200902199317224047   Reference number:96A0857743

Planar Edge Termination for 4H-Silicon Carbide Devices.

4H-炭化けい素のためのプレーナエッジ終端
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Volume: 43  Issue:Page: 1315-1317  Publication year: Aug. 1996 
JST Material Number: C0222A  ISSN: 0018-9383  CODEN: IETDAI  Document type: Article
Article type: 短報  Country of issue: United States (USA)  Language: ENGLISH (EN)
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