Art

J-GLOBAL ID：200902199327357487   Reference number：95A0854500

Vacuum photoresists on the base of phenoxazine and their lithographic properties.

Author (4)： AGABEKOV V E (Inst. Physical Organic Chemistry, Belarus Acad. Sci., Minsk, SUN) ,  IGNASHEVA O E (Inst. Physical Organic Chemistry, Belarus Acad. Sci., Minsk, SUN) ,  GUDIMENKO Y I (Inst. Physical Organic Chemistry, Belarus Acad. Sci., Minsk, SUN) ,  BELYATSKY V N (Inst. Physical Organic Chemistry, Belarus Acad. Sci., Minsk, SUN)
Material： Proceedings of SPIE  (Proceedings. SPIE - The International Society for Optical Engineering)
Volume： 2438  Page： 889-899  Publication year： 1995 
JST Material Number： D0943A  ISSN： 0277-786X  CODEN： PSISDG  Document type： Proceedings
Country of issue： United States (USA)  Language： ENGLISH (EN)