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J-GLOBAL ID:200902201093987320   Reference number:07A0234946

Sub-wavelength surface structures on silicon irradiated by femtosecond laser pulses at 1300 and 2100 nm wavelengths

波長1300及び2100nmのフェムト秒レーザパルスを照射したシリコン上のサブ波長表面構造
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Volume: 253  Issue: 11  Page: 4970-4977  Publication year: Mar. 30, 2007 
JST Material Number: B0707B  ISSN: 0169-4332  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Laser irradiation effects and damages  ,  Surface structure of semiconductors 
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