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J-GLOBAL ID:200902201195508477   Reference number:07A0545854

Ellipsometric Characterization on Multi-Layered Thin Film Systems during Hydrogenation

水素化の際の多層薄膜系についての偏光解析法キャラクタリゼーション
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Volume: 48  Issue:Page: 1380-1386  Publication year: Jun. 01, 2007 
JST Material Number: G0668A  ISSN: 1345-9678  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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