Art
J-GLOBAL ID：200902201519827732
Reference number：06A0588268
Wide Frequency Band of Pressure Feedback Using Positive Feedback for an Air Spring Type Anti-Vibration Apparatus
空圧式除振装置に対する正帰還を用いた圧力フィードバックの高帯域化
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Author (2)：
,
Material：
Volume：
72
Issue：
719
Page：
2219-2225
Publication year：
Jul. 25, 2006
JST Material Number：
F0045B
ISSN：
0387-5024
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
JAPANESE (JA)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Propagation of vibrations
, Buffers,springs
Reference (7)：
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Canon. Active anti-vibration apparatus. Patent 3286201. 2002
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Canon. Exposure apparatus. Open patent 2001-044109. 2001
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Canon. Active anti-vibration apparatus and exposure apparatus. EP1124078A2. 2001
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Nikon. Support machine, manufacturing method for its machine, and both stage and exposure apparatuses. Open patent 2004-079630. 2004
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Fujikuragomu. Flexible airtight material and anti-vibration apparatus using its material. Open patent 2003-194219. 2003
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Terms in the title (5)：
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