Line-Edge Roughness: Characterization and Material Origin

YAMAGUCHI T; YAMAZAKI K; NAGASE M; NAMATSU H

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J-GLOBAL ID：200902201753390062 Reference number：03A0506384

Line-Edge Roughness: Characterization and Material Origin

ライン-エッジ粗さ:特性評価と材料の原因

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Material：
Volume： 42 Issue： 6B Page： 3755-3762 Publication year： Jun. 30, 2003
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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