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J-GLOBAL ID:200902201923806315   Reference number:05A0804821

Carbon nanomaterial depositions using surface-wave excited low-pressure plasma CVD

表面波励起低圧プラズマCVDによるカーボンナノ物質の合成
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Volume: PST-05  Issue: 51-53.55-57.59.61-67  Page: 1-5  Publication year: 2005 
JST Material Number: Z0951A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Applications of plasma 
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