Art
J-GLOBAL ID：200902206476170159   Reference number：04A0418757

Localized deposition of hydrocarbon using plasma activated chemical vapour deposition

プラズマ活性化化学蒸着を用いた炭化水素の局所的堆積
Author (2)：
ABHINANDAN L

About ABHINANDAN L

(Fraunhofer-Inst. fuer Angewandte Polymerforschung, Golm/Potsdam, DEU)

About Fraunhofer-Inst. fuer Angewandte Polymerforschung, Golm/Potsdam, DEU

, 
HOLLAENDER A

About HOLLAENDER A

(Fraunhofer-Inst. fuer Angewandte Polymerforschung, Golm/Potsdam, DEU)

About Fraunhofer-Inst. fuer Angewandte Polymerforschung, Golm/Potsdam, DEU


Material：
Thin Solid Films

About Thin Solid Films


Volume： 457  Issue： 2  Page： 241-245  Publication year： Jun. 15, 2004 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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*hydrocarbon

About hydrocarbon

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
マイクロジェットCVD

About マイクロジェットCVD

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Thin films of organic compounds 
(BK14070L)

About Thin films of organic compounds

,  Techniques and equipment of thin film deposition 
(BK14020I)

About Techniques and equipment of thin film deposition

Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Acetylene

About Acetylene

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
プラズマ

About プラズマ

, 
活性化

About 活性化

, 
化学蒸着

About 化学蒸着

, 
炭化水素

About 炭化水素

, 
堆積

About 堆積


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