VUV Reflection Spectroscopy of SiO<sub>2</sub> and SiO<sub>2-x</sub> Thin Films

NAKAGAWA K.; TSUDA T.; IWAI T.; SHIRAISHI Y.; IWAI Y.; CHANG SL.; MIZUNUMA T.; MATSUMOTO S.; MATSUMOTO H.

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J-GLOBAL ID：200902206926800689 Reference number：06A0611307

VUV Reflection Spectroscopy of SiO₂ and SiO_2-x Thin Films

SiO₂とSiO_2-x薄膜のVUV反射分光法

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Author (9)： , , , , , , , ,
Material：
Volume： 2005 Page： 86 Publication year： Jul. 2006
JST Material Number： L2127A ISSN： 0911-5730 Document type： Article
Article type：短報 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Visible and ultraviolet spectra of inorganic compounds

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VUV Reflection Spectroscopy of SiO2 and SiO2-x Thin Films

VUV Reflection Spectroscopy of SiO₂ and SiO_2-x Thin Films