Effects of hydrogen on film properties of diamond-like carbon films prepared by reactive radio-frequency magnetron sputtering using hydrogen gas

MIKAMI T.; NAKAZAWA H.; KUDO M.; MASHITA M.

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J-GLOBAL ID：200902207207269544 Reference number：05A0677933

Effects of hydrogen on film properties of diamond-like carbon films prepared by reactive radio-frequency magnetron sputtering using hydrogen gas

水素ガスを用いた反応性高周波マグネトロンスパッタリングにより作製したダイヤモンド状炭素膜の膜特性に及ぼす水素の効果

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Material：
Volume： 488 Issue： 1-2 Page： 87-92 Publication year： Sep. 22, 2005
JST Material Number： B0899A ISSN： 0040-6090 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Mechanical properties of solids in general , Infrared spectra,Raman scattering and Raman spectra of inorganic compounds

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