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J-GLOBAL ID：200902207266303713   Reference number：05A1021564

Mechanism of Residual Stress Control in Thin Films by Means of Substrate Vibration

基板励振による薄膜の残留応力制御の機構
Author (3)：
SUZUKI TAKAMASA

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(名古屋大 大学院)

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, 
MATSUMURO AKIHITO

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(名古屋大 大学院)

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, 
TAKAHASHI YUTAKA

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(三重大)

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Material：
精密工学会誌  (Journal of the Japan Society for Precision Engineering)

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Volume： 71  Issue： 4  Page： 460-465  Publication year： Apr. 05, 2005 
JST Material Number： F0268A  ISSN： 0912-0289  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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substrate(plate)

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,...
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titanium nitride

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JST classification (1)：
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Techniques and equipment of thin film deposition 
(BK14020I)

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Terms in the title (3)：
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励振

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, 
薄膜

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, 
残留

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