Art

J-GLOBAL ID：200902208964292479   Reference number：08A0466431

2 Degree-of-Freedom Spiral Micromirror Manipulator Fabrication and Spatial Mechanical Assembling

二自由度螺旋状マイクロミラーマニピュレータの製造および空間機械的組立

Author (4)： SADAT Seid Hossein (Interdisciplinary Graduate School of Sci. & Engineering, Tokyo Inst. of Technol.) ,  KAMIYA Daiki (Precision & Intelligence Lab., Tokyo Inst. of Technol.) ,  BAGHERI Saeed (School of Engineering, Tokyo Inst. of Technol.) ,  HORIE Mikio (Interdisciplinary Graduate School of Sci. & Engineering, Tokyo Inst. of Technol.)
Material： Journal of Advanced Mechanical Design, Systems, and Manufacturing (Web)  (J Adv Mech Des Syst Manuf (Web))
Volume： 2  Issue： 2  Page： 265-270 (J-STAGE)  Publication year： 2008 
JST Material Number： U0027A  ISSN： 1881-3054  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： MEMS ,  optical switch ,  *reflecting mirror ,  micromachining ,  spirality ,  *manipulator ,  manufacturing ,  *assembly ,  actuator
Semi thesaurus term： *micromirror

JST classification (2)： Design,manufacturing,and components of robots  (IC04013A) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (8)：

• 1. V. A. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. B. Chan, M. E. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. T. Neilson, J. Kim, C. R. Giles, and D. Bishop, “Beam-steering micromirrors for large optical cross-connects,” J. Lightwave Technology., Vol. 21, pp. 634-642, 2003.
• 2. H. Toshiyoshi and H. Fujita, “Electrostatic micro torsion mirrors for an optical switch matrix,” Microelectromechanical systems, Vol. 5, No. 4, pp. 231-237, 1996.
• 3. R. Ryf, J. Kim, J. Hickey, A. Gnauck, D. Carr, F. Pardo, C. Bolle, R. Graham, N. Basavanhally, C. Yoh, D. Ramsey, R. Boie, R. George, J. Kraus, C. Lichtenwalner, R. Papazian, J. Gates, H. Shea, A. Gasparyan, V. Muratov, and J. Griffith, “1296-port MEMS transparent optical crossconnect with 2.07 Petabit/s switch capacity,” in OFC 2001, Vol. 54 OSA Trends in Optics and Photonics Series (Opt. Soc. Amer., Washington, DC2001), 2001, post deadline paper, PD28.
• 4. P. B. Chu, S.-S. Lee, and S. Park, “MEMS: the path to large optical cross-connects,” IEEE Commun. Mag., no. 3, pp. 80-87, 2002.
• 5. B. Mi, D. A. Smith, H. Kahn, F. L. Merat, A. H. Heuer, Stephen M. Phillips, “Static and electrically actuated Shaped MEMS mirrors”, Microelectromechanical systems, Vol. 14. No. 1, 2005, pp. 29-36.

Terms in the title (5)： 自由度 ,  螺旋状 ,  マイクロミラー ,  マニピュレータ ,  組立