Nucleation and growth of nanocrystalline silicon studied by TEM, XPS and ESR

SATO K; IZUMI T; IWASE M; SHOW Y; MORISAKI H; YAGUCHI T; KAMINO T

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J-GLOBAL ID：200902211567362445 Reference number：03A0506041

Nucleation and growth of nanocrystalline silicon studied by TEM, XPS and ESR

ナノ結晶シリコンの核形成及び成長のTEM,XPS及びESRによる研究

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Material：
Volume： 216 Issue： 1/4 Page： 376-381 Publication year： Jun. 30, 2003
JST Material Number： B0707B ISSN： 0169-4332 Document type： Article
Article type：短報 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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