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J-GLOBAL ID:200902212598416116   Reference number:05A0876503

Electrical Properties of a Thin Anodized Capacitor Made of Y-Doped Al Alloy Film

YドープのAl合金膜から作製された陽極酸化の薄いキャパシタの電気的性質
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Volume: 44  Issue: 9A  Page: 6731-6735  Publication year: Sep. 15, 2005 
JST Material Number: G0520B  ISSN: 0021-4922  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: ENGLISH (EN)
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Reference (17):
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  • 2) R. M. Fleming, D. V. Lang, C. D. W. Jones, M. L. Steigerwald, D. M. Murphy, G. B. Alers, Y. H. Wong, R. B. von Dover, J. R. Kwo and A. M. Sergent: J. Appl. Phys. 88 (2002) 850.
  • 3) J. Zhang and I. Boyd: Appl. Surf. Phys. 186 (2002) 40.
  • 4) A. Noya and T. Umezawa: Trans. IEICE Electron. J67-C (1984) 863 [in Japanese].
  • 5) K. Sasaki, M. Yamane, Y. Abe and A. Noya: Trans. IEICE Electron. J78-C-II (1995) 113 [in Japanese].
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