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J-GLOBAL ID：200902213019226676   Reference number：03A0209851

薄板とマイクロ構造物との固相接合

Author (1)：
YOSHIKAWA KATSUYUKI

About YOSHIKAWA KATSUYUKI

(阿南工高専)

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Material：
Symposium on Microjoining and Assembly Technology in Electronics  (Proceedings of the Symposium on Microjoining and Assembly Technology in Electronics)

About Symposium on Microjoining and Assembly Technology in Electronics


Volume： 9th  Page： 95-98  Publication year： Feb. 06, 2003 
JST Material Number： L2496A  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*micro structure

About micro structure

,...
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JST classification (1)：
JST classification
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Manufacturing technology of solid-state devices 
(NC03030V)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
薄板

About 薄板

, 
マイクロ構造

About マイクロ構造

, 
固相接合

About 固相接合


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