Art
J-GLOBAL ID：200902213793828891
Reference number：06A0131678
A survey of automated material handling systems in 300-mm semiconductor fabs
300mm半導体製造における自動化マテリアルハンドリングシステムの調査
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Author (2)：
,
Material：
Volume：
19
Issue：
1
Page：
112-120
Publication year：
Feb. 2006
JST Material Number：
T0521A
ISSN：
0894-6507
CODEN：
ITSMED
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices
, Materials handling
Terms in the title (4)：
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