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J-GLOBAL ID：200902213834106960   Reference number：06A0304325

Preparation of Monosized Silicon Micro Particles by Pulsated Orifice Ejection Method

振動オリフィス射出法による単一サイズのシリコン微粒子の作製

Author (4)： DONG Wei (Micro Powder Res. Inst., Sendai, JPN) ,  TAKAGI Kenta (Tohoku Univ., Sendai, JPN) ,  MASUDA Satoshi (Tohoku Univ., Sendai, JPN) ,  KAWASAKI Akira (Tohoku Univ., Sendai, JPN)
Material： 粉体および粉末冶金  (Journal of the Japan Society of Powder and Powder Metallurgy)
Volume： 53  Issue： 4  Page： 346-351  Publication year： Apr. 15, 2006 
JST Material Number： F0691A  ISSN： 0532-8799  CODEN： FOFUA2  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *powder production ,...
Semi thesaurus term： *silica ,...

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JST classification (1)： Manufacturing of ceramics and ceramic whiteware  (YC03020V)

Reference (15)：

• 1) N. Takeda: "Ball semiconductor technology and its application to MEMS", Proceedings of IEEE/ MEMS 2000, Miyazaki, (2000) 11-16.
• 2) R. Toda, N. Takeda, T. Murakoshi, S. Nakamura and M. Esashi: "Electrostatically levitated spherical 3-axis accelerometer", Technical Digest of MEMS'02, Las Vegas, (2002) 710-713.
• 3) K. Takagi, K. Seno and A. Kawasaki: "Fabrication of a three-dimensional terahertz photonic crystal using monosized spherical particles", Appl. Phys. Lett., 85 (2004) 3681-3683.
• 4) M. Asano, N. Nagai, A. Kawasaki and R. Watanabe: "Optimization of process parameters for preparing honodisperse particles by pulsated orifice injection method", J. Jpn. Soc. Powder Powder Metallurgy, 43 (1996) 1273-1278.
• 5) Y. Kuroki, A. Kawasaki and R. Watanabe: "Preparation of monosized metal powders by pulsated orifice injection", J. Jpn. Soc. Powder Powder Metallurgy, 38 (1991) 700-706.

Terms in the title (6)： オリフィス ,  射出 ,  サイズ ,  シリコン ,  微粒子 ,  作製