Art

J-GLOBAL ID：200902217490204602   Reference number：09A1282828

Wide Pressure Range Measurement due to the Exchange of Heater Driving of the Temperature Difference Sensor

温度差センサのヒータ駆動切替えによる広範囲圧力測定

Author (2)： TAKASHIMA NORIAKI (東北学院大学 工学研究科) ,  KIMURA MITSUTERU (東北学院大学 工学研究科)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 129  Issue： 12  Page： 444-449 (J-STAGE)  Publication year： 2009 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)

Thesaurus term： temperature sensor ,  *vacuum gage ,  thermocouple ,  oscillation ,  thermometer ,  measuring instrument
Semi thesaurus term： *ピラニ真空センサ

JST classification (1)： Measuring methods and instruments of force,work load,pressure,friction  (AD05050V)

Reference (6)：

• PUERS, R. The Nano Pirani-an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping. Sensors and Actuators A : Physical. 2002, 97-98, 208-214
• DOMS, M. Micro Pirani pressure sensor for atmospheric pressure. Sensor 2005 Proceedings. 2005, 1, 115-120
• VAN HERWAARDEN, A. W. Thermal sensors based on the Seebeck effect. Sensors and Actuators A. 1986, 10, 321-346
• LEE, S. S. Short-circuit measurement by Seebeck current detection of a single thermocouple and its application. Sensors and Actuators, A. 2007, 139, 104-110
• TAKASHIMA, N. Proposal of a New Type Thin Film Vacuum Sensor Using the Short Circuit Current-Detection Type Thermocouple. Proceedings of the 25th Sensor Symposium, 2008. 2008, 85-88

Terms in the title (4)： 温度差 ,  ヒータ ,  切替え ,  圧力測定