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J-GLOBAL ID：200902218403603551   Reference number：04A0749980

A z-axis differential capacitive SOI accelerometer with vertical comb electrodes

垂直櫛型電極を持つz軸差動式静電容量SOI加速度計
Author (2)：
TSUCHIYA T

About TSUCHIYA T

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
FUNABASHI H

About FUNABASHI H

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN


Material：
Sensors and Actuators. A. Physical  (Sens Actuators A)

About Sensors and Actuators. A. Physical


Volume： A116  Issue： 3  Page： 378-383  Publication year： Oct. 29, 2004 
JST Material Number： B0345C  ISSN： 0924-4247  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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*accelerometer

About accelerometer

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of time,speed,acceleration,angular veloc? 
(AD05040K)

About Measuring methods and instruments of time,speed,acceleration,angular veloc?

Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
垂直

About 垂直

, 
櫛型電極

About 櫛型電極

, 
z軸

About z軸

, 
差動

About 差動

, 
静電容量

About 静電容量

, 
SOI

About SOI

, 
加速度計

About 加速度計


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