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J-GLOBAL ID：200902219844498571   Reference number：08A0833271

Characterization of Ni/i-AlGaN/GaN Schottky Samples Fabricated after H3PO4-Etching

リン酸エッチング後に作製したNi/i-AlGaN/GaNショットキ試料
Author (4)：
SAWADA Takayuki

About SAWADA Takayuki

(Hokkaido Inst. Technol., Sapporo, JPN)

About Hokkaido Inst. Technol., Sapporo, JPN

, 
KAIZUKA Yuta

About KAIZUKA Yuta

(Hokkaido Inst. Technol., Sapporo, JPN)

About Hokkaido Inst. Technol., Sapporo, JPN

, 
TAKAHASHI Kensuke

About TAKAHASHI Kensuke

(Hokkaido Inst. Technol., Sapporo, JPN)

About Hokkaido Inst. Technol., Sapporo, JPN

, 
IMAI Kazuaki

About IMAI Kazuaki

(Hokkaido Inst. Technol., Sapporo, JPN)

About Hokkaido Inst. Technol., Sapporo, JPN


Material：
電子情報通信学会技術研究報告  (IEICE Technical Report (Institute of Electronics, Information and Communication Engineers))

About 電子情報通信学会技術研究報告


Volume： 108  Issue： 121(ED2008 39-108)  Page： 351-355  Publication year： Jul. 02, 2008 
JST Material Number： S0532B  ISSN： 0913-5685  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
etching

About etching

, 
phosphoric acid

About phosphoric acid

, 
current-voltage characteristic

About current-voltage characteristic

, 
Hall effect

About Hall effect

, 
Nickel

About Nickel

, 
*semiconductor material

About semiconductor material

, 
*gallium nitride

About gallium nitride

, 
*Schottky barrier

About Schottky barrier

, 
*electrical characteristic

About electrical characteristic

, 
*heterojunction

About heterojunction

, 
wet etching

About wet etching

, 
*aluminum gallium nitride

About aluminum gallium nitride


Semi thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
nickel

About nickel

, 
*AlGaN

About AlGaN


JST classification (1)：
JST classification
Category name(code) classified by JST.
Measurement,testing and reliability of solid-state devices 
(NC03040G)

About Measurement,testing and reliability of solid-state devices

Terms in the title (6)：
Terms in the title
Keywords automatically extracted from the title.
リン酸

About リン酸

, 
エッチング

About エッチング

, 
作製

About 作製

, 
Ni

About Ni

, 
GaN

About GaN

, 
試料

About 試料


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